Fasahar bututun iskar gas mai tsafta muhimmin bangare ne na tsarin samar da iskar gas mai tsafta, wanda shine mabuɗin fasaha don isar da iskar gas mai tsafta da ake buƙata zuwa wurin amfani kuma har yanzu yana kula da ingantaccen ingancin;Fasahar bututun iskar gas mai tsabta ta haɗa da daidaitaccen tsarin tsarin, zaɓin kayan aiki da kayan haɗi, gini da shigarwa, da gwaji.A cikin 'yan shekarun nan, ƙaƙƙarfan ƙaƙƙarfan buƙatu akan tsabta da ƙazantaccen abun ciki na iskar gas mai tsafta a cikin samar da samfuran microelectronics waɗanda ke wakilta ta manyan da'irori masu haɗaka sun sanya fasahar bututun iskar gas mai tsabta ta ƙara damuwa da kuma jaddada.Mai zuwa shine taƙaitaccen bayani na tsaftataccen bututun iskar gas daga zaɓin kayan aikiof gine-gine, da kuma yarda da gudanarwa na yau da kullum.
Nau'in iskar gas gama gari
Rarraba iskar gas na gama gari a cikin masana'antar lantarki:
Gas na gama gari(Babban gas): hydrogen (H2)nitrogen (N2oxygen (O2), argon (A2), da sauransu.
Gas na musammansu SiH4 ,PH3 ,B2H6 ,A8H3 ,CL ,HCL,CF4 ,NH3,POCL3, SIH2CL2 SIHCL3,NH3, BCL3 ,SIF4 ,Farashin CLF3 ,CO,C2F6, N2O,F2,HF,HBR SF6…… da sauransu.
Nau'o'in iskar gas na musamman ana iya rarraba su azaman masu lalatagas, mai gubagas, mai ƙonewagas, mai ƙonewagas, rashin aikigas, da sauransu. Gas ɗin da ake amfani da su na semiconductor gabaɗaya ana rarraba su kamar haka.
(i) Mai lalacewa/mai gubagas: HCL, BF3, WF6, HBr , SiH2Cl2, NH3, PH3, Cl2, BCl3…da sauransu.
(ii) Flammabilitygas: H2, CH4, SiH4, PH3, AsH3, SiH2Cl2, B2H6, CH2F2,CH3F, CO… da sauransu.
(iii) ƙonewagas: O2, Cl2, N2O, NF3… da dai sauransu.
(iv) Rashin hankaligas: N2, CF4, C2F6, C4F8,SF6, CO2, Ne, Kr, Shi…da sauransu.
Yawancin iskar gas na semiconductor na da illa ga jikin mutum.Musamman, wasu daga cikin waɗannan iskar gas, kamar SiH4 konewa ba tare da bata lokaci ba, idan dai ɗigon ruwa zai yi ƙarfi tare da iskar oxygen a cikin iska kuma ya fara ƙonewa;da ASH3mai guba sosai, duk wani ɗigo kaɗan na iya haifar da haɗarin rayuwar ɗan adam, saboda waɗannan hatsarori a bayyane yake, don haka buƙatun aminci na ƙirar tsarin yana da girma musamman.
Iyakar aikace-aikace na gas
A matsayin muhimmin tushen albarkatun masana'antu na zamani, ana amfani da samfuran gas da yawa, kuma ana amfani da babban adadin iskar gas na yau da kullun ko iskar gas na musamman a cikin ƙarfe, ƙarfe, man fetur, masana'antar sinadarai, injina, lantarki, gilashi, yumbu, kayan gini, gini, gini. , sarrafa abinci, magunguna da sassan likitanci.Aiwatar da iskar gas yana da tasiri mai mahimmanci akan fasaha mai girma na waɗannan filayen musamman, kuma shine iskar gas ɗin ɗanyen abu wanda ba makawa ko kuma iskar gas ɗinsa.Sai kawai tare da buƙatu da haɓaka sabbin sassan masana'antu daban-daban da kimiyya da fasaha na zamani, ana iya haɓaka samfuran masana'antar iskar gas ta hanyar tsalle-tsalle ta fuskar iri-iri, inganci da yawa.
Aikace-aikacen gas a cikin microelectronics da masana'antar semiconductor
Yin amfani da iskar gas ya kasance yana taka muhimmiyar rawa a cikin tsarin semiconductor, musamman tsarin semiconductor an yi amfani dashi sosai a masana'antu daban-daban, daga ULSI na gargajiya, TFT-LCD zuwa masana'antar micro-electro-mechanical (MEMS) na yanzu, duk wanda ke amfani da abin da ake kira tsarin semiconductor azaman tsarin masana'anta na samfuran.Tsabtataccen iskar gas yana da tasiri mai mahimmanci akan aiwatar da abubuwan da aka gyara da samfuran samfuran, kuma amincin iskar gas yana da alaƙa da lafiyar ma'aikata da amincin ayyukan shuka.
Muhimmancin bututu mai tsafta a cikin jigilar iskar gas mai tsafta
A cikin aikin narkewar bakin karfe da yin kayan aiki, kusan 200g na iskar gas za a iya sha kowace ton.Bayan sarrafa bakin karfe, ba kawai samansa na makale da gurbace iri-iri ba, har ma a cikin lattin karfensa ya sha wani adadin iskar gas.Idan aka samu iska ta bututun, karfen ya sha wannan bangare na iskar zai sake shiga cikin iskar, yana gurbata iskar gas mai tsafta.Lokacin da iskar da ke cikin bututun ya daina gudana, bututun yana daɗa iskar gas a ƙarƙashin matsin lamba, kuma lokacin da iskar ta daina wucewa, iskar gas ɗin da bututun ya yi ya haifar da ɗigon matsa lamba don warwarewa, kuma gas ɗin da aka warware shima yana shiga cikin tsaftataccen iskar da ke cikin bututun. kamar kazanta.A lokaci guda kuma, ana maimaita tadawa da ƙuduri, ta yadda ƙarfen da ke saman bututun na ciki shi ma ya samar da wani adadin foda, kuma wannan ƙurar ƙurar ƙurar ma tana gurɓata tsaftataccen iskar da ke cikin bututun.Wannan sifa na bututu yana da mahimmanci don tabbatar da tsabtar iskar gas ɗin da aka ɗauka, wanda ke buƙatar ba kawai mai laushi mai zurfi na ciki na bututu ba, har ma da juriya mai girma.
Lokacin da aka yi amfani da iskar gas mai ƙarfi mai lalata, dole ne a yi amfani da bututun bakin karfe mai jure lalata don bututun.In ba haka ba, bututun zai haifar da gurɓataccen gurɓataccen abu a saman ciki saboda lalata, kuma a cikin lokuta masu tsanani, za a sami babban yanki na cire ƙarfe ko ma huda, wanda zai gurɓata tsabtataccen iskar gas da za a rarraba.
Haɗin haɗaɗɗen tsafta da tsaftataccen iskar gas da bututun rarraba na manyan magudanar ruwa.
A ka'ida, dukkanin su ana walda su, kuma ana buƙatar bututun da ake amfani da su don samun wani canji a cikin tsari lokacin da ake amfani da walda.Abubuwan da ke da babban abun ciki na carbon suna ƙarƙashin ƙarancin iska na sassan welded lokacin waldawa, wanda ke haifar da shigar juna na iskar gas a ciki da wajen bututu kuma yana lalata tsabta, bushewa da tsaftar iskar da ake watsawa, wanda ke haifar da asarar iskar gas. duk kokarinmu.
A taƙaice, don iskar gas mai tsabta da bututun watsa iskar gas na musamman, ya zama dole a yi amfani da magani na musamman na bututun bakin karfe mai tsafta, don yin tsarin bututun mai tsabta (ciki har da bututu, kayan aiki, bawul, VMB, VMP) a ciki. Rarraba iskar gas mai tsafta ya mamaye muhimmin manufa.
Gaba ɗaya ra'ayi na fasaha mai tsabta don watsawa da rarraba bututun
Mai tsafta mai tsaftataccen iskar gas mai tsafta tare da bututu yana nufin cewa akwai wasu buƙatu ko sarrafawa don abubuwa uku na iskar da za a ɗauka.
Tsaftar iskar gas: Abubuwan da ke cikin yanayin ƙazanta a cikin tsaftar gGas: Abubuwan da ke cikin yanayi na ƙazanta a cikin iskar gas, yawanci ana bayyana su azaman kaso na tsaftar iskar gas, kamar 99.9999%, kuma an bayyana shi azaman ƙarar rabo na ƙazantaccen yanayi abun ciki ppm, ppb, ppt.
Dryness: adadin damshin iskar gas, ko adadin da ake kira jika, yawanci ana bayyana shi ta fuskar raɓa, kamar yanayin raɓa na yanayi -70.C.
Tsaftace: adadin gurɓataccen barbashi da ke cikin iskar gas, girman barbashi na µm, adadin barbashi/M3 nawa don bayyanawa, don iskar da aka matsa, yawanci kuma ana bayyanawa dangane da adadin MG/m3 na ƙaƙƙarfan ragowar da ba za a iya kaucewa ba, wanda ke rufe abun cikin mai. .
Rarraba girman ƙazanta: ƙwayoyin gurɓataccen abu, galibi suna nufin zazzage bututun, lalacewa, lalata da ƙwayoyin ƙarfe ke haifarwa, barbashi na tsatsa na yanayi, da ƙananan ƙwayoyin cuta, phages da ɗigon iskar gas mai ɗauke da danshi, da sauransu, gwargwadon girman girmansa. an kasu kashi
a) Manyan barbashi - girman barbashi sama da 5μm
b) Barbashi - diamita abu tsakanin 0.1μm-5μm
c) Ultra-micro barbashi - girman barbashi kasa da 0.1μm.
Don haɓaka aikace-aikacen wannan fasaha, don samun damar fahimtar fahimtar girman barbashi da raka'a μm, an tanadar da takamaiman takamaiman matsayin barbashi don tunani.
Mai zuwa shine kwatancen takamaiman barbashi
| Suna / Girman sashin (µm) | Suna / Girman sashin (µm) | Suna/ Girman barbashi (µm) |
| Kwayar cuta 0.003-0.0 | Aerosol 0.03-1 | Aerosolized microdroplet 1-12 |
| Makaman nukiliya 0.01-0.1 | Fenti 0.1-6 | Fly ash 1-200 |
| Carbon baki 0.01-0.3 | Milk foda 0.1-10 | Maganin kashe kwari 5-10 |
| Gudun ruwa 0.01-1 | Kwayoyin cuta 0.3-30 | Kurar siminti 5-100 |
| Sigari 0.01-1 | Yashi kura 0.5-5 | Pollen 10-15 |
| Siliki 0.02-0.1 | Maganin kashe kwari 0.5-10 | Gashin mutum 50-120 |
| Gishiri mai ƙira 0.03-0.5 | Ƙurar sulfur mai daɗaɗɗa 1-11 | Yashin teku 100-1200 |
Lokacin aikawa: Juni-14-2022