Yin amfani da gas a cikin masana'antar semiconductor na squemictor ɗin da suka koma farkon shekarun 1950 zuwa 1960. A lokacin tsarin masana'antar semiconontortortor din, gases ana amfani da gas don tsabtace da kuma kare kayan semiconductor don tabbatar da tsarkakakkun kayan aikinsu da inganci. Daga cikin gas da aka saba amfani da shi shine nitrogen da hydrogen.
Yayin da fasaha na semiconductectors da masana'antu suka ci gaba da inganta, buƙatun gas ya ƙaru. A cikin 1970, ci gaba da ci gaban fasahar masana'antu, aikace-aikacen gas a cikin manyan fina-finai da kuma ojn sf6) da oxygen ya zama ana amfani da shi da oxygen. 1980 ya ga kara karuwa a cikin bukatar gases tare da ci gaban da'irori da hade da su. Hydrogen da aka yi amfani da shi sosai a cikin tsarin masana'antu, gami da an bayyana hydrogen na hydrogen da hydrogen vapor. Kuma daga 1990 zuwa yanzu, da buƙatar babban gas da takamaiman gas sun karu a matsayin masu girman na'urar semictionctoric sun gabatar da su. Misali, aikace-aikace na matsanancin ulteliviolet Lithiography (EUV) yana buƙatar amfani da gas mai tsabta mai girman kai kamar nitrogen da hydrogen.
Gas din Semiccicor ya ci gaba da haɓaka samfuran samfuran da yawa, yayin da kayan gano gas, da sauransu, da kuma aikinsu na ainihi kamar haka:
Masu gudanar da matsin lamba: mahimman ayyukan matsin lamba ne da ake amfani da su don sarrafa matsin gas. Yawancin lokaci suna ƙunshe da bawul ɗin maimaitawa da kuma firikwensin. Masu gudanar da matsin lamba sun dauki babban shigar da iskar gas kuma suna ƙi matsin da iskar gas ta hanyar daidaita bawul don saduwa da takamaiman bukatun aikace-aikace. Ana amfani da masu gudanar da matsin lamba a cikin yankunan kamar masana'antu, masana'antu da dakunan gwaje-gwaje, da kuma masana'antar semicondiker, a tsakaninsu, don tabbatar da kwanciyar hankali da amincin gas.
Ana amfani da bawul na Gas: ana amfani da bawules gas don sarrafa kwararar gas da kuma rufe hanyoyin gas. Yawancin lokaci suna da aikin on / kashe aikin da ke buɗe ko rufe gas. Akwai nau'ikan bawuloli iri daban-daban, gami da bawuloli, bawuloli da bawuloli da babuta na pnumic. An yi amfani da su sosai a tsarin gas don sarrafa kwarara, matsin lamba da gas na gas.
Gas matsin gas: Ana amfani da Gauge Gas don auna matakin matsin mai. Yawancin lokaci ana shigar dasu a mahimman wurare a tsarin gas don lura da canje-canje matsa lamba kuma tabbatar da cewa suna cikin iyakokin tsaro. An yi amfani da Gas ta matsin lamba a masana'antu, masana'antu da dakunan gwaje-gwaje, kuma masana'antar semicontions ta kasance ta shiga.
Masu gano gas: Ana amfani da masu gano gas don gano leaks a tsarin gas. Sun ganoKasancewar gas da sauti ƙararrawa don a iya ɗaukar matakin da aka dace don hana hatsarin Lantarki. Ana amfani da masu gano gas da yawa sosai a masana'antu, sunadarai, da aikace-aikacen mai, da masana'antar gas, da masana'antar semicontorcory sun shiga cikin.
Lokacin Post: Feb-20-2024